ESC 211Material, Safety and Equipment Overview for Nanotechnology
Nanotechnology processing equipment and materials handling procedures with a focus on safety, environment, and health issues. E SC 211 Material, Safety, and Equipment Overview for Nanotechnology (3) This course overviews basic material properties as well as environment, health, and safety (EHS) issues in equipment operation and materials handling in "top down" and "bottom up" nanofabrication. The chemical and physical materials properties underlying nanotechnology are surveyed. EHS topics arising from the processing and disposal of these materials are addressed including: cleanroom operation, OSHA lab standard safety training, health issues, biosafety levels (BSL) guidelines, and environmental concerns. Specific safety issues dealing with nanofabrication equipment, materials, and processing will also be discussed including those pertinent to wet benches, thermal processing tools, vacuum systems and pumps, gas delivery systems and toxic substance handling and detection.